Multi target DC Magnetron Sputtering

Multi target DC Magnetron Sputtering

  • Make: VR Technologies
  • Model: VRT/DCS/2020

Specifications:

  • 2” 2 Nos Targets with 2 DC power supplies
  • Turbo Molecular Pump
  • Water Chiller

Designed for:

  • Metal films
  • Metal Oxide Films
  • Metal Multilayer Thin films

Location: Room No. 110, Cellar, C.V Raman Bhavan

Other Facilities & Infrastructure